Diode ion vacuum pumps NMD-0,063 and NMDI-0,063
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NMD-0,063 and NMDI-0,063 |
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Diode ion vacuum NMD-0,063 pumps are used for oil-free extraction of gases and gas mixtures (air) from vacuum systems and creation of high and ultrahigh vacuum. Diode ion vacuum pumps NMD-0,063 are used as a part of vacuum processing equipment.
Diode ion vacuum pumps NMD-0,063 are not intended for extraction of inert gases and continuous pumping of hydrogen (inert gases and hydrogen can be pumped only as impurities to chemically active gases with atomic weight higher than 14). Their capacity is reduced if they are used to pump hydrocarbons. Inert gases can be extracted by diode ion vacuum pumps NMDI-0,063.
The pumps are supplied in a moderately cold climate modification category 4 according to GOST 15150. Ion pumps are powered by special power supply units (further – BPM), not included in the delivery package of the pump.
Diode ion vacuum pumps NMD-0,063 are produced in two modifications of the connecting flange to the pump body: according to OST 11 868.007 (FO) and according to GOST 26526 (FG).
Example of identification code that can be used to order ion vacuum pump NMD-0,063:
NOTE: Power supply units BPM for diode ion vacuum the pumps are supplied by a separate order, together with the pump or separately. Key features of NMD-0,063 and NMDI-0,063 vacuum pumps are shown in the table below. Design and basic dimensions of counter flanges of diode ion vacuum pumps are shown in the Appendix. Basic specifications of BPM power supply units recommended for our pumps are shown in with General specifications of ion vacuum pumps.